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|Highly Parallel Wafer-Level-Reliability Systems with Modular SMUs
Issue: KIPiS 2016 #6
WLR systems, which have been
around for decades, vary in both measurement
capability and architecture.
Specialized WLR systems may involve
high-frequency ac or pulsed stimulus.
However, most CMOS devices are tested
with dc instruments such as source measure
units (SMUs), which supply the
necessary stress and measurement capability
for collecting parametric data.